Very large spot size effect in nanosecond laser drilling efficiency of silicon
نویسندگان
چکیده
منابع مشابه
Ultraviolet femtosecond and nanosecond laser ablation of silicon: ablation efficiency and laser-induced plasma expansion
Femtosecond laser ablation of silicon in air was studied and compared with nanosecond laser ablation at ultraviolet wavelength (266 nm). Laser ablation efficiency was studied by measuring crater depth as a function of pulse number. For the same number of laser pulses, the fs-ablated crater was about two times deeper than the ns-crater. The temperature and electron number density of the pulsed l...
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چکیده ندارد.
15 صفحه اولExtended defects formation in nanosecond laser-annealed ion implanted silicon.
Damage evolution and dopant distribution during nanosecond laser thermal annealing of ion implanted silicon have been investigated by means of transmission electron microscopy, secondary ion mass spectrometry, and atom probe tomography. Different melting front positions were realized and studied: nonmelt, partial melt, and full melt with respect to the as-implanted dopant profile. In both boron...
متن کاملDiagnostics of silicon plasmas produced by visible nanosecond laser ablation
Ž . The second harmonic of a pulsed Nd:YAG laser 532 nm has been used for the ablation of silicon samples in air at atmospheric pressure. In order to study the interaction for silicon targets, the laser-induced plasma characteristics were examined in detail with the use of a spaceand time-resolved technique. Electron temperatures, ionic temperatures and electron number densities were determined...
متن کاملThe effect of axial length on laser spot size and laser irradiance.
OBJECTIVE To determine the effect of the axial length of the eye on laser spot size and irradiance. DESIGN Experimental study using a calibrated Gullstrand-type model eye. METHODS The model eye, which was fitted with a scale of half circles in the center of the artificial fundus, was first examined using 2 different fundus imaging systems, then with a setup of a slitlamp, 2 indirect condens...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2010
ISSN: 1094-4087
DOI: 10.1364/oe.18.023488